System structure:
Configuration:
Motion control card: GSN
Servo Drive: GSHD + GSFD
Stepper Drive: GMXD
IO module: GTM module
Control bus: gLink-II
Motors: Linear & rotation servo motor, stepper motor
Features:
The GSN+GSHD motion control solution based on gLink-II bus meets the nanoscale process requirements of equipment.
High speed: 400G/800G optical module dual LENS coupling efficiency is 9 minutes/piece, dual FA coupling efficiency is 8 minutes per piece.
High precision: repeated positioning accuracy of ± 50nm, minimum step distance of 50nm, static jitter of ± 20nm, Steady state error ≤ ± 15nm.
High stability: Full round-trip 50nm micro step operation within 30ms.
High efficiency: 10K multi-channel high-speed latch analog sampling with high coupling efficiency.
Application scenarios: Optical communication, LiDAR.