System structure：
Configuration：
Motion control card: GSN
Servo Drive: GSHD
Stepper Drive: GMXD
Axis module: GNM module
Control bus: gLink-II
Motors: Linear & rotation servo motor, stepper motor, ZR motor
Features：
The GSN+GSHD force control solution based on gLink-1 bus achieves high-speed and high-precision force control.
High speed: The acceleration of the gantry axis is 2G, the speed is 2m/s, and the movement rhythm is increased by more than twice.
High precision: The synchronization error of the gantry is less than 30um throughout the entire section, and the error is set to 5um within 4ms;Z-axis repeat positioning accuracy ± 1um, R-axis repeat positioning accuracy ± 0.02 degrees, force control accuracy ± 1g
High efficiency: Equipment production capacity>3000 pieces/hour. Soft landing function, no sensor force control.
Application scenarios: semiconductors, optics, consumer electronics.
